1200c Three-Zone Low-Vacuum CVD Furnace with 3-Channel Mass Flow Meter

1200c Three-Zone Low-Vacuum CVD Furnace with 3-Channel Mass Flow Meter

1200C three-zone reduced-vacuum CVD furnace with three-channel mass flow meter

Product description of CVD furnace

1200C three-zone low-vacuum CVD furnace with three-channel mass stream meter is made up of a three-heating zone tube furnace, a 3-channel mass flow meter and a double phase rotary vane vacuum pump.

tube furnace
The 3 heating zones of the tube furnace are independently temperature managed by the precision temperature management instrument. By modifying the temperature of each and every temperature zone, the tube furnace can sort three temperature gradients in the heating zone or form a prolonged continuous temperature zone. Each and every zone can be edited with 30 sections of temperature rise and drop, with overheating and quick circuit protection.

vacuum gauge and a mechanical pressure gauge:
The flanges on each sides of the furnace tube are equipped with a digital vacuum gauge and a mechanical stress gauge, which can be used to handle the environment in the furnace tube. At the identical time, the tube furnace is operated by substantial-definition accurate shade contact display, which is effortless to use. Even non-experts can master the use of the instrument right after straightforward coaching, which can significantly enhance your experiment efficiency.
mass flowmeter:
The program is outfitted with three-channel mass flowmeter, which has high precision and substantial dependability. It can accurately blend one~3 channels of gas. The procedure panel adopts electronic show, which is intuitive and successful. If you have specific requirements, you can speak to the technician to personalize any quantity of gas channels.

purposes: 1200ºC three heating zone reduced vacuum CVD furnace
 This tools is employed by its customers to analysis, layout, and manufacture these materials or coatings for aerospace motor components, medical implants, semiconductors, photo voltaic cells, wise glass, carbon nanotubes, nanowires, LEDs, MEMS, and other purposes.

CZPT parameters of CVD furnace

Vacuum tube   furnace Design CY-O1200-50IIIT
Tube materials Higher purity quartz
Tube diameter 50mm (Optional 60mm, 80mm, 100mm)
Tube size 1300mm
CZPT chamber   duration 1060mm
Heating zone   duration 300mm+300mm+300mm
Running   temperature ~1100ºC
Temperature   management accuracy ±1ºC
Temperature   management mode 30 or 50 section program temperature handle
Show method Lcd
CZPT   approach 304 stainless metal vacuum flange
Flange   interface 1/four” ferrule connector, KF16/twenty five/forty joint
Vacuum four.4E-3Pa
Power source AC:220V   fifty/60Hz
Fuel offer   technique Product CY-3Z
Gasoline channel 3-channel
Measuring   device Gasoline mass stream meter
Measuring   assortment A channel: ~100SCCM H2 gasoline Remarks: If you need to have other ranges or fuel kinds, you need to have to specify when purchasing. In accordance to the customer’s certain needs, the stream meter of the   corresponding fuel kind and variety can be chosen.
B channel: ~300SCCM N2 fuel
C channel: ~500SCCM Ar gas
measurement  precision ±1.%F.S
Pipe stress resistance 3MPa
Working   strain distinction fifty~300KPa
Connecting   pipe 304 stainless steel
Fuel channel 304 stainless metal needle valve
Interface   specification one/4″ ferrule connector for gasoline inlet and outlet
Exhaust   method CZPT   pump Rotary vane pump
Pumping rate 1.1L/S   
Exhaust   interface KF16
Vacuum   measurement Resistance gauge
Final   vacuum one.0E-1Pa
Energy source AC:220V   fifty/60Hz
Pumping   interface KF16

Be aware According to the requirements of the experiment, you can choose the temperature, temperature zone, furnace measurement, vacuum method, flowmeter

Connected photos  of CVD furnace

tube furnace

mass flowmeter:

rotary vane vacuum pump

Founded in 2005, HangZhou CY CZPT CZPT Co., Ltd. is a business specializing in the growth and creation of laboratory technology analysis tools. The merchandise are mixed, pressed, burned, cut, floor, polished, coated, analytical products and connected consumables. CZPT include laboratory sintering products, coating products and so on. At current, it has been exported to twenty five nations and regions such as the CZPT States, CZPTe, and CZPT Asia, and has been effectively gained by a variety of scientific study units.

We have a experienced technology investigation and development group, the variety of experts is 33, the business has 150 men and women, much more than 500 sq. meters of business office place, the manufacturing unit handles an location of about one,500 sq. meters located in HangZhou Large-tech Zone CZPTtronic CZPT Park. The products are mostly found in the investigation market, serving scientific analysis in the labs of universities and schools, and can also personalize merchandise according to your needs.

Q. Are you a company or a buying and selling business?
A. We are skilled laboratory instrument companies, have their own design and style staff and manufacturing unit, have mature technological experience, and can guarantee the top quality of items and the optimal cost.

Q. How is your firm’s merchandise after-income services system?
A. The merchandise guarantee period is twelve months, we can give life span maintenance. We have specialist pre-revenue and soon after-income departments that can answer to you inside 24 hrs to take care of any technological issues.

Q. How extended is your supply time? If I want to customise the instrument, how lengthy does it consider?
A.one. If the merchandise are in inventory, it is five-10 days. two. We can offer CZPT companies for our consumers. It typically requires 30-60 times relying on the requirements of the custom instrument.

Q. Our country’s power supply and plug are different. How do you fix it?
A. We can offer a transformer and plug in accordance to your nearby requirements according to the energy plug of different countries.

Q. How to pay out?
A.T / T, L / C, D / P, and so forth., it is advisable to use Alibaba CZPT Guarantee.

Q. How is the bundle of items? Shipping approaches?
A.one. Standard export fumigation signal picket box packaging two. Categorical, air, sea transport in accordance to customer demands, locate the most appropriate way.

More questions, make sure you make contact with consumer service


1200c Three-Zone Low-Vacuum CVD Furnace with 3-Channel Mass Flow Meter